摘要 |
PROBLEM TO BE SOLVED: To obtain an optical element which is free from scratches, deposition, etc. on a polished surface, by eliminating an affected zone of a machining tool due to deposition etc. depositing on a machining surface of a machining tool during polishing and machining the optical element. SOLUTION: The polished surface 2a of the optical element 2 is polished and machined by abutting the machining tool 1 to the polished surface 2a and relatively moving the machining tool 1 on the same while machining fluid 5 is supplied to a contact surface. According to the method, a bump portion 15 in the affected zone, that is formed on the machining surface 1a of the machining tool 1 in the process of the polishing and machining, is removed, and at the same time the polishing and machining operation is continuously carried out on the machining surface 1a from which the bump portion 15 has been removed. COPYRIGHT: (C)2007,JPO&INPIT
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