| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a machining method and a machining device with which, when the surface of a workpiece is irradiated with a laser beam from an oblique direction, a uniform energy distribution can be obtained on the irradiated face of the surface of the workpiece. <P>SOLUTION: A laser beam is formed into an energy distribution with a top hat shape, and the workpiece 11 is irradiated with the laser beam from an oblique direction so as to machine the same. The device is provided with: a laser oscillator 1; a first lens 3a on which a laser beam 2a emitted from the laser oscillator 1 is made incident so that the workpiece 11 is irradiated with the laser beam 2a from an oblique direction, and whose focal distance differs in accordance with irradiation positions; and a second lens 3b which is arranged so as to be confronted with the first lens 3a, and forms the laser beam 2a made incident from the oblique direction to the top hat shape. The workpiece 11 is irradiated with the laser beam via the first and second lenses 3a, 3b. In this way, a uniform energy distribution can be obtained on the irradiation face of the surface of the workpiece. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
