VAPORIZATION EQUIPMENT OF LIQUID PHASE MATTER

摘要

An equipment for vaporizing a liquid phase material, which can be applied as a precursor generator for a nanoparticle production system and accelerates evaporation of a precursor solution efficiently as compared with a conventional precursor generator to convert a liquid phase into a gas phase uniformly and supply a high flux of precursor gas into the nanoparticle production system promptly, is provided. An equipment for vaporizing a liquid phase material comprises: a perforated plate(2) formed in an upper part within a chamber(1) containing a liquid phase solution such that the liquid phase solution can not pass through the perforated plate; a porous body(7) mounted on an end of a gas inflow pipe(3) for flowing a gas or inert gas into the chamber; and a gas exhaust pipe(4) for exhausting gas vaporized from a precursor solution within the chamber. The equipment further comprises: a supersonic wave generation part(6) mounted on the bottom of the chamber within the chamber; a thermometer(13) and a manometer(14) for measuring temperature and pressure within the chamber; a pressure controller(15) and a flow control part(10) mounted on one side of the gas inflow pipe; and a heater(12) mounted on an outer portion of the bottom of the chamber.