| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a system and a method for a laser beam cutting-off operation of a master carrier for the magnetic transfer, by which system and method, the quality of a cut-off surface can be secured and the deformation of the surface in the neighborhood of the cut-off surface can be prevented. <P>SOLUTION: When a workpiece 32 is cut off by irradiating the workpiece 32 with a laser beam 34 irradiated from a laser beam source 36 while turning a rotary stage 76, the laser beam 34 is detected with a sensor 40 when finishing the cutting-off of the irradiated portion, and the detected signal is transferred to a cutting-off determination-processing portion 42. Then, the cutting-off determination-processing portion 42 determines that the irradiated portion has been cut off based on the detected signal, and transmits a cutting-off stopping signal to a laser transmission control section 44. The laser transmission control section 44 stops the supply of the pulse voltage to the laser beam source 36 based on the cutting-off stopping signal. As a result, the irradiation of the laser beam 34 from the laser beam source 36 to the irradiated portion is stopped. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
