| 摘要 |
PROBLEM TO BE SOLVED: To provide a switching valve monitoring mechanism which detects troubles with a valve without touching gas inside a tube path when trouble rises in a switching valve which carries out reverse on/off operation for introducing gas into a rector. SOLUTION: The mechanism has a first switching valve 1 which carries out reverse on/off operation mutually in pairs and switches a first gas or a second gas, and a second switching valve 2 which carries out reverse on/off operation mutually with the first switching valve in pairs and switches introduced gas via a mass flow controller 5 to a reactor 3 or a first by-pass tube path 42. Before treatment, one side 11 of the first switching valve and one side 22 of the second switching valve work completely open relative to one another, and the flow rate monitored by the mass flow controller 5 can be also monitored in the first mass flow meter 51. In treatment, the other 12 of the first switching valve and the other 21 of the second switching valve completely open relative to one another, and the flow rate monitored by the mass flow controller 5 cannot be monitored in the first mass flow meter 51. COPYRIGHT: (C)2007,JPO&INPIT
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