| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce influence of a measurement error in a stage device measuring a position by using a laser interferometer and a mirror. <P>SOLUTION: The stage device for measuring the position of a stage by using the interferometer and the mirror reflecting light from the laser interferometer comprises a mirror shape calculation means for calculating the shape of the mirror, and a temperature regulating means for regulating the temperature of the mirror on the basis of output from the mirror shape calculation means. <P>COPYRIGHT: (C)2007,JPO&INPIT |
