| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor with a simple structure which detects angular velocities around predetermined three-dimensional axes. SOLUTION: Surroundings of a flexible substrate 570 consisting of a conductive material are fixed to the sensor case 560. A vibrator 550 is adhered in the center of an under surface. A piezo-electric element 540 is adhered on top surface of the flexible substrate 570. The top electrodes L1-L4 are formed in the top surface. The vibrator 550 is vibrating in an X axis direction by supplying a predetermined phase alternating current signal between the top electrodes L1-L4 and the conductive flexible substrate 570. Under this status, the displacement to a Z axis of the vibrator 550 by the Z axis Coriolis force applied to the vibrator 550 is detected, based on the voltage generated between another unshown top electrode formed on the top surface of the piezo-electric element 540 and the conductive flexible substrate 570, then the detected voltage is output as a value showing a Y axis angular velocity. COPYRIGHT: (C)2007,JPO&INPIT
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