| 摘要 |
PROBLEM TO BE SOLVED: To provide a probing system capable of measuring efficiently a one-chip semiconductor device requiring highly accurate positioning. SOLUTION: This probing system for connecting a terminal of each tester to an electrode of the semiconductor device in order to inspect the one-chip semiconductor device 100 by a plurality of testers is equipped with a plurality of measuring stations 1A-1C arranged in due order, a loading part 5 for supplying the semiconductor device, an unloading part 6, and a chip conveying mechanism 1A-1D for conveying the semiconductor device. Each measuring station is equipped with a probe 11 for connecting electrically the electrode of the semiconductor device to the terminal of each tester, a chuck stage 21 for holding the one-chip semiconductor device, and a moving rotating mechanism mechanism 22-31 for moving and rotating the chuck stage. The semiconductor device is inspected successively on each of the plurality of measuring stations. COPYRIGHT: (C)2007,JPO&INPIT
|
