| 摘要 |
PROBLEM TO BE SOLVED: To arrange highly densely pressure detection objects such as a pressure chamber, and to enhance detection sensitivity of a pressure. SOLUTION: This pressure sensor 70c having the first electrode 721c and the second electrode 722c for sandwiching a piezoelectric body in the thickness direction, which is provided in common to a plurality of pressure detection objects, has a constitution wherein, in at least either electrode of the first electrode 721c and the second electrode 722c, the width of a connection part 84 corresponding to the interval between the pressure detection objects is formed more narrowly than the with 83 of a part corresponding to each pressure detection object. COPYRIGHT: (C)2007,JPO&INPIT
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