| 摘要 |
An ionizer is provided to improve the removing efficiency of static electricity generated between a stage and a substrate, thereby stably manufacturing an LCD, by disposing an ion generator on the stage. A stage(110) is configured to support a substrate. An ion generator(120) is disposed on the stage, and generates ions. A lift unit(130) is configured to separate the substrate from the stage. A first hole is formed in the stage to receive the ion generator. The lift unit includes a lift pin(132) passing through the stage, and a lift driver(130) for vertically reciprocating the lift pin. A second hole is formed in the stage to make the lift pin pass therethrough. |
