| 摘要 |
PROBLEM TO BE SOLVED: To inspect even a region where the presence of foreign matter can not inspected heretofore and to more enhance the decision reliability of the presence of the foreign matter than before. SOLUTION: The computer of the X-ray foreign matter detector sets a dividing threshold for dividing an inspection target region 31, which is supposed to correspond to the inspection target in the X-ray image formed on the basis of the dose of the X rays transmitted through the fed inspection target, into a strong affecting region 31a and a non-strong affecting region 31b. The presence of the foreign matter is determined with respect to the X-ray image of the strong affecting region 31a by the processing for the strong affecting region 31a and the presence of the foreign matter is determined with respect to the X-ray image of the non-strong affecting region 31b by the processing for the non-strong affecting region 31b. COPYRIGHT: (C)2007,JPO&INPIT
|
