SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

A semiconductor manufacturing apparatus is provided to perform continuously predetermined processes and to reduce the process time by loading stably a variety of wafers using a plurality of loading members with the same size. A semiconductor manufacturing apparatus includes a reaction chamber(1000), a support member, and at least one or more loading members. The support member(1100) is arranged in the reaction chamber. The loading members(1200) are arranged on the support member to load stably various wafers regardless of wafer sizes. The semiconductor manufacturing apparatus further includes a transfer module for loading/unloading the loading member to/from the support member.