EQUIPMENT AND METHOD FOR MEASURING SILICON CONCENTRATION IN PHOSPHORIC ACID SOLUTION

摘要

Equipment and a method for measuring silicon concentration in a phosphoric acid solution are provided to simplify a silicon concentration measuring process by measuring silicon concentration without a preprocess. Equipment for measuring silicon concentration in a phosphoric acid solution includes at least a reaction tank(1) and a concentration-measuring tank(7). The reaction tank includes a reaction unit for adding hydrofluoric acid to the constant amount of phosphoric acid solution drawn from a semiconductor substrate processing system to form a silicon fluoride compound and evaporate the silicon fluoride compound. The concentration-measuring tank includes a hydrolysis unit for bubbling the silicon fluoride compound evaporated from the reaction tank through deionized water to hydrolyze the silicon fluoride compound and a measurement unit for determining a change rate of silicon concentration in the deionized water subsequent to the bubbling.