发明名称 SUBSTRATE STORAGE CONTAINER AND METHOD FOR MANUFACTURING THE SAME
摘要 A substrate container and a manufacturing method thereof are provided to prevent the damage of a substrate by using a plurality of first and second support members with low attrition characteristics. A substrate container includes a container body, a plurality of first support members and a plurality of second support member. The container body(1) are used for storing a plurality of substrate. The plurality of first support members(20) are arranged at both lower sidewalls of the container body in order to support a peripheral region of the substrate. The plurality of second support members(24) arranged at both upper sidewalls of the container body in order to support the peripheral region of the substrate. The first and second support members have relatively low attrition characteristics compared to the container body.
申请公布号 KR20060119816(A) 申请公布日期 2006.11.24
申请号 KR20060044443 申请日期 2006.05.17
申请人 SHIN-ETSU POLYMER CO., LTD. 发明人 HASEGAWA AKIHIRO;MIMURA HIROSHI
分类号 H01L21/02 主分类号 H01L21/02
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