EQUIPMENT FOR MANUFACTURING A DISPLAY PANEL AND METHOD FOR MANUFACTURING THE DISPLAY PANEL

摘要

A display panel manufacturing apparatus and a manufacturing method thereof are provided to simplify manufacturing processes and to reduce fabricating costs by performing a channel layer etching process and a protective layer depositing process only in the apparatus itself using an etch chamber and a deposition chamber. A display panel manufacturing apparatus includes a cassette loading unit(110) for loading a cassette(10) with a plurality of substrates(20), a transfer robot(120) for transferring the substrates of the cassette, an etch chamber(150) for etching partially a channel layer of the substrate, and a deposition chamber(160) for forming a protection layer on the substrate.