| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve uniformity and stability of surface wave excitation plasma. <P>SOLUTION: A dielectric member 2 is fixed to a lid 12 with a metal bolt 21 through an O-ring 14. A polyimide sleeve 22 is arranged on the side of the bolt 21, and a polyimide cap 23 is arranged on the top of the bolt 21. The bolt 21, especially the periphery of a top 21b, is packed with the insulating material of polyimide. The end face 22e of the sleeve 22 and the end face 23e of the cap 23 are flush with the lower surface of the dielectric member 2, and a dielectric plate 3 is fixed to tightly contact the surface by a bolt 30 of alumina ceramics. With this configuration, a local discharging of the bolt 21 is prevented to generate and maintain uniform and stable surface wave excitation plasma P. <P>COPYRIGHT: (C)2007,JPO&INPIT |
