| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently and finely peel a plated gold film with high accuracy. <P>SOLUTION: This peeling apparatus has an outgoing beam unit 16 which receives a second-harmonic YAG laser beam SHG from a YAG laser oscillator through an optical fiber 18, passes the second-harmonic YAG laser beam SHG emitted from an end face of the optical fiber 18 through an optical lens in the unit, and emits it from an outgoing opening at a head. The peeling method includes irradiating a peeling region (HE) set in each contact (W), from which the plated gold film is to be peeled off, with a condensed oval beam spot SP<SB>SHG</SB>having high ovality. In the peeling region (HE), the plated gold layer 12 is evaporated and removed in the vicinity of the oval beam spot SP<SB>SHG</SB>by laser energy for an instant. The peeling method also includes relatively moving (scanning) the YAG second harmonic laser beam SHG with respect to the contact W to be processed in order to remove most of the plated gold layer 12 in the peeling region (HE). <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
