| 摘要 |
PROBLEM TO BE SOLVED: To provide a development processor that can efficiently control the temperature of a processing liquid. SOLUTION: One of a plurality of processing liquid tanks of the development apparatus is equipped with a temperature control device for controlling the temperature of a processing liquid reserved in the tank to a predetermined temperature; a circulation passage for heat exchange for allowing the process liquid in the processing liquid tank having the temperature controlling device to pass through another processing liquid tank for exchanging heat with a processing liquid in the latter process liquid tank and then to return the liquid to the original processing liquid tank; a pump device for circulating a liquid through the circulation passage for heat exchange; and a process liquid replenishing device for replenishing the processing liquid tank with a process liquid. The developing device is further equipped with a pump controlling function of controlling the driving of the pump device and to control a circulation flow amount of a processing liquid so as to control the driving of the pump device, in such a manner that when increasing the temperature of the processing liquid, the circulation flow amount of the liquid is increased; and when replenishing the processing liquid by the processing liquid replenishing device, the circulation flow amount of the processing liquid is decreased. COPYRIGHT: (C)2007,JPO&INPIT
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