| 摘要 |
PROBLEM TO BE SOLVED: To realize accurate distance measurement with distance measuring equipment for measuring distance to an object to be measured by detecting a signal level appearing in a displacement sensor of which the inductive inductance varies according to the distance to the object to be measured such as an eddy current sensor. SOLUTION: The distance measuring equipment 1 comprises a displacement sensor 10 of which the inductive inductance varies according to the distance to the object to be measured 3A, an oscillation circuit 20 for supplying the displacement sensor with alternating current signal which can change the frequency of the supplying alternating current signal, an inductance measuring means 80 for measuring the inductive inductance of the displacement sensor 10 from the difference of the signal level appearing in the displacement sensor to which alternating current signal with different frequency is impressed, and a distance measuring means 90 for measuring the distance to the object to be measured based on the measured inductive inductance. COPYRIGHT: (C)2007,JPO&INPIT
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