| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact type inspection device suitable for high-speed low-cost total inline inspection. SOLUTION: This contact type inspection device includes a light irradiation means 100, a transparent plate 110 through which light L from the light irradiation means 100 enters the inside, and a total reflection phenomenon disturbance detection means 120. In the device, at least one surface among surfaces constituting the transparent plate 110 is the first reflecting surface 111 reflecting totally the light L entering the inside, wherein an inspection object is brought into contact with the outer surface side, and the total reflection phenomenon disturbance detection means 120 detects disturbance of a total reflection phenomenon of light on the first reflecting surface 111. COPYRIGHT: (C)2007,JPO&INPIT
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