| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS (microelectro mechanical system) resonator having a simple structure and realizing vibration in a high frequency band in a structure in which a vibrator supporting beam is formed on both side faces of a disk-like vibrator. SOLUTION: The MEMS resonator 10 is provided with the disk-like vibrator 20; a pair of excitation electrodes 30 oppositely provided on both the sides of the vibrator 20 while having a gap 35 on the external periphery of the vibrator 20; a pair of vibrator supporting beams 21 extending from both the side faces of the vibrator 20 to a portion between the pair of the excitation electrodes; a power feeding circuit 40 for applying in-phase AC power to the pair of excitation electrodes 30; and an output circuit 50 for acquiring output corresponding to electrostatic capacity between the vibrator 20 and the pair of excitation electrodes 30. A connection portion 24 between the external periphery of the vibrator 20 and the pair of excitation electrodes 30 forms connection by a continuous smooth curve. COPYRIGHT: (C)2007,JPO&INPIT
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