| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of relieving the job of moving a substrate-carrying means at maintenance, and improving even the points of safety assurance of workers and of the apparatus. SOLUTION: The substrate processing apparatus 1 includes an indexer 3 and an apparatus body 10 coupled with the indexer 3. The apparatus body 10 includes a plurality of substrate processing units 41 to 48 for applying processing to a substrate W, and a main carrying robot 30, provided to a carrying chamber surrounding of which is surrounded by the substrate processing units 41 to 48. The apparatus body 10 includes a lower side guide rail 51 and an upper side guide rail 60 for guiding the horizontal movement of the main carrying robot 30, from the carrying chamber to a maintenance region at the outside of the carrying chamber. Wheels 39a, 39b, 40a, 40b engaged with the rails 51, 60 are fitted to a robot body 38 of the main carrying robot 30. COPYRIGHT: (C)2007,JPO&INPIT
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