| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acceleration sensor with its acceleration sensor chip downsized and with metallic wiring of the sensor chip prevented from being damaged by a spacer member in the process of bonding the sensor chip to a stopper. <P>SOLUTION: This acceleration sensor includes the acceleration sensor chip 1, a tabular stopper 2 disposed opposite to one surface of the sensor chip 1 to regulate excessive displacement of a weight part 12, the spacer member 8 provided between a peripheral part of the stopper 2 and a frame part 11 of the sensor chip 1, and a bond part 6 comprising a bonding agent for covering the spacer member 8 and bonding the peripheral part of the stopper 2 to the frame part 11 of the sensor chip 1. A protective film 17 is formed on the one surface side of the frame part 11 of the sensor chip 1 for protecting a portion of the metallic wiring 16 overlapping with the spacer member 8, out of the metallic wiring 16 electrically connected to a piezoresistance R which is a gauge resistance. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
