| 摘要 |
There are provided a surface inspection device and a surface inspection method capable of surely inspecting the fine repetition pitch without reducing the wavelength of the light applied. The surface inspection device includes: means (13) for illuminating the repeated pattern formed on the surface of a substrate (20) to be inspected, by using a rectilinear polarized light (L1); means (11, 12) for setting the angle between the oscillation surface direction of the rectilinear polarized light (L1) and the repetition direction of the repeated pattern on the surface, to be inclined; means (38) for extracting a polarized light component (L4) vertical to the oscillation surface of the rectilinear polarized light (L1) among the light (L2) generated in the regular reflection direction from the repeated pattern; and means (39, 15) for inspecting a defect in the repeated pattern according to the light intensity of the polarized light component (L4). |
