THERMAL IMAGING METHOD AND APPARATUS

摘要

An inspection apparatus includes a light source positioned to direct light to a first surface of a workpiece. An infrared detector is positioned to receive radiation from the first surface. A data acquisition and processing computer is coupled to the light source and the infrared detector. The computer triggers the light source to emit the light a number of instances. The computer acquires thermal data from the infrared detector for a number of times after each of the instances. The computer is configured to process the data using a theoretical solution to analyze the thermal data based upon an average of the thermal data for a number of each of corresponding ones of the times from different ones of the instances.