| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for laser beam machining, which apparatus can machine a machining region having an appropriate length according to the temperature of a workpiece. <P>SOLUTION: The apparatus for laser beam machining comprises: a stage which has a datum point and a reference point defined on its surface, and holds the workpiece, and moves the workpiece based on a control signal input thereto from outside; a laser beam source for irradiating the workpiece held by the stage with the laser beam; a position detector for acquiring the positional information of the datum point and the reference point; and a control unit which calculates the moving distance of the stage based on the positional information of the datum point and the reference point acquired with the position detector, and controls the stage based on the moving distance. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
