发明名称 FINE ADJUSTMENT DEVICE AND OPTICAL ELEMENT ADJUSTER
摘要 <P>PROBLEM TO BE SOLVED: To provide a fine adjustment device and an optical element adjuster capable of effective pressurization to an actuator under any conditions. <P>SOLUTION: In the fine adjustment device employing a piezo-actuator, load is applied to a roof plate through the use of a magnet as a means for pressurization. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006319047(A) 申请公布日期 2006.11.24
申请号 JP20050138627 申请日期 2005.05.11
申请人 CANON INC 发明人 FUSE NAOTO
分类号 H01L21/027;G02B7/04;G21K1/06 主分类号 H01L21/027
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