| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacitive ultrasonic transducer in which an elastically hardly deformable region is configured near the center of a membrane, an elastically deformable region is configured around the membrane and an electric flux between electrodes becomes perpendicular to the electrodes near the center. SOLUTION: The electrostatic capacitive ultrasonic vibrator is configured by integrating transducer elements each consisting of a vibrator cell consisting of a silicon substrate, a first electrode arranged on the top surface of the silicon substrate, a second electrode opposes the first electrode and arranged with a predetermined gap, a membrane for supporting the second electrode, and a membrane supporting the membrane for supporting the membrane. The electrostatic capacitive ultrasonic transducer has a structure in which the end of the membrane is relatively more deformable than the center of the membrane to solve the above problem. COPYRIGHT: (C)2007,JPO&INPIT
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