| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit light irradiation device capable of generating uniform slit light having no irregularities. SOLUTION: This slit light irradiation device, which is a slit light irradiation device used for a pattern inspection method and a pattern inspection device, is characterized by being equipped with a light emission part for irradiating light; a light diffusion part for diffusing uniformly the light irradiated from the light emission part; the first parallel light generation part for receiving the uniform diffused light acquired from the light diffusion part, and generating parallel light; a slit light generation part for receiving the parallel light from the first parallel light generation part, and generating slit light having the width determined beforehand; and the second parallel light generation part for receiving the slit light having the width determined beforehand from the slit light generation part, and generating parallel light having the same width. COPYRIGHT: (C)2007,JPO&INPIT
|
