A BEAM APERTURE MAKED SLIT BY CROSSING VANE

摘要

An ion beam extraction apparatus of ion implantation equipment is provided to prevent fine particles from being diffused by using a tube. A plurality of vane plates(4) are symmetrically installed based on a rotating shaft(5) to use a formation of a slit(6). The plurality of vane plates are arranged at the same intervals. The rotating shaft is connected to a drive motor. Each of vane plates has a rectangle shape and is made of graphite. The vane plates intersect each other to form a slit having a rectangle shape. A size of the slit is adjusted according to a rotating degree of the vane plates. A motor shaft engages with the rotating shaft which allows the vane plates to be rotated. An ion beam(8) is discharged from an arc chamber(7) and passes through the slit to focus.