| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a fine pattern precisely in drawing processing by raster scan using a light modulation unit. <P>SOLUTION: In a situation where an exposure area EA is irradiated with light of substantially constant intensity distribution, overlap exposure is performed according to continuous movement system and raster scanning. A DMD is arranged such that the exposure area EA inclines by a predetermined angle α against the feeding direction. The angle α is determined such that the diagonal line of the exposure area EA becomes parallel with the main scanning direction (X direction) and the exposure area EA is moved by a distance RH equal to one half of scanning band width RB along the feeding direction. <P>COPYRIGHT: (C)2007,JPO&INPIT |
