发明名称 POLISHING CLOTH
摘要 <P>PROBLEM TO BE SOLVED: To provide a polishing cloth with a long service life and capable of preventing a flaw from occurring on a notch. <P>SOLUTION: Resin is attached to nonwoven cloth serving as a base material, a preferable range of density is 0.3-0.6 g/cm<SP>3</SP>, and a preferable range of hardness is 60-90 in Asker C hardness. The nonwoven cloth as the base material preferably contains one or more kinds of fibers selected from a group including polyester fiber, nylon fiber, polypropylene fiber, polyvinyl alcohol fiber, and a poly (p-phenylene terephthalamide) fiber. The resin to be attached preferably contains one or more kinds selected from a group including urethane resin, acrylic resin, melamine resin, phenol resin and epoxy resin. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006319045(A) 申请公布日期 2006.11.24
申请号 JP20050138583 申请日期 2005.05.11
申请人 NITTA HAAS INC 发明人 HABA SHINICHI;TODA TOMOYUKI;SUGITA TOYOJI;YOSHIDA KOICHI
分类号 H01L21/304;B24B37/20 主分类号 H01L21/304
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