HIGH THERMALLY CONDUCTIVE ALUMINUM NITRIDE SINTERED PRODUCT

摘要

A high thermally conductive aluminum nitride sintered product, characterized in that it has a ratio (IAl2Y4O9 /IAlN) of an X-ray diffraction intensity IAl2Y4O9 of Al2Y4O9(201 face) to an X-ray diffraction intensity IAlN of aluminum nitride (101 face) of 0.002 to 0. 03, and it exhibits a thermal conductivity of 220 W/m K or more and a three-point flexural strength of 250 MPa or more. The above aluminum nitride sintered product exhibits a high thermal conductivity and excellent heat radiating property.