发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device and a method for manufacturing the same are provided to enhance current drive performance of an N channel MIS type transistor and a P channel MIS type transistor by forming a tensile stress layer on the N channel MIS type transistor and forming a compressive stress layer on the P channel MIS type transistor. A semiconductor device comprises an N channel MIS type transistor(21) and a P channel MIS type transistor(31). The semiconductor device further includes a first interlayer(41) formed on the N channel MIS type transistor and the first interlayer has tensile stress. The semiconductor device further includes a second interlayer(42) formed on the first interlayer and the P channel MIS type transistor and the second interlayer has the compressive stress. The compressive stress of the second interlayer is relaxed on an upper surface of the first interlayer.
申请公布号 KR20060119773(A) 申请公布日期 2006.11.24
申请号 KR20060043691 申请日期 2006.05.16
申请人 SONY CORPORATION 发明人 HACHIMINE KIYOTA
分类号 H01L21/335;H01L27/10 主分类号 H01L21/335
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