发明名称 POWDER TRAP OF EXHAUST PIPE HAVING TRANSPARENT WINDOW
摘要 A power trap apparatus of an exhaust pipe is provided to extend the maintenance period and to shorten the maintenance time of the exhaust pipe by using an expanding exhaust pipe with a transparent window. A powder trap includes an exhaust pipe(71), at least one expanding exhaust pipe(74) connected in series to the exhaust pipe, and a different exhaust pipe(73) connected to the expanding exhaust pipe. The expanding exhaust pipe has at least one transparent window(76). The expanding exhaust pipe further includes an inhalant region(75) having a narrow inlet and a wide outlet, and an exhaust region(77) having a wide inlet and a narrow outlet. Inside diameters(W2,W5) of the narrow inlet and the narrow outlet are same to the inside diameter(W1) of the exhaust pipe.
申请公布号 KR20060119169(A) 申请公布日期 2006.11.24
申请号 KR20050041792 申请日期 2005.05.18
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, JUNG NAM
分类号 H01L21/02 主分类号 H01L21/02
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