| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply integration unit in which foot space can be reduced easily using existing components. SOLUTION: The gas supply integration unit 11 comprises a plurality of gas units 12 for mounting a plurality of components, such as a primary filter 1, a manual valve 2, a regulator 3, a pressure manometer 4, an input valve 5, a mass flow controller 6, an output valve 7, a secondary filter 8, a check valve 9, and a purge valve 10. In the unit 11, structures 13a, 13b and 13c are provided for holding the gas units 12a-12i while shifting the arrangement in the height direction of the gas unit 12. COPYRIGHT: (C)2007,JPO&INPIT
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