| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved system and method of inspection. SOLUTION: This is the inspection system equipped with an illumination system designed to provide lighting beam for illuminating the target, and a first detection system designed to detect radiation scattering in the direction of nonzero order diffraction from this target. Further this detection system is equipped with a distribution element for distributing the radiation scattering in the direction of nonzero order diffraction from the target, and a radiation induction device built and arranged so as to measure intensity of radiation distributed by the above distribution element. COPYRIGHT: (C)2007,JPO&INPIT
|
