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经营范围
发明名称
A method for forming a contact plug of a semiconductor device
摘要
申请公布号
KR100649824(B1)
申请公布日期
2006.11.24
申请号
KR20040050951
申请日期
2004.07.01
申请人
发明人
分类号
H01L21/283
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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