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发明名称
Sequential pulse deposition
摘要
A method for growing films on substrates using sequentially pulsed precursors and reactants, system and devices for performing the method, semiconductor devices so produced, and machine readable media containing the method.
申请公布号
US2006265100(A1)
申请公布日期
2006.11.23
申请号
US20060496093
申请日期
2006.07.31
申请人
MICRON TECHNOLOGY, INC.
发明人
LI WEIMIN
分类号
G06F19/00;C23C8/00;C23C16/00;C23C16/44;C23C16/455;H01L21/20;H01L21/285;H01L21/314;H01L21/44;H01L27/01
主分类号
G06F19/00
代理机构
代理人
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