DISPERSER FOR CARBURETOR, CARBURETOR FOR MOCVD USING THE DISPERSER FOR CARBURETOR, AND CARRIER GAS VAPORIZING METHOD

摘要

A disperser for a carburetor capable of preventing a dispersion from being crystallized when a carrier gas in which thin-film forming materials were dispersed is jetted from an end jetting port therein, a carburetor for MOCVD using the disperser for carburetor, and a carrier gas vaporizing method. The plurality of thin- film forming materials are dispersed in the carrier gas led into a gas passage by a dispersion part positioned midway in the gas passage (35) in which the carrier gas is introduced. Air flow flowing generally along the jetting direction of the carrier gas in which the plurality of thin-film forming materials jetted from the end jetting port (35b) was dispersed is jetted from an air flow jetting port (38) formed near the end jetting port (35b) positioned at the downstream end part of the gas passage (35).