SUBSTRATES INCLUDING A CAPPING LAYER ON ELECTRICALLY CONDUCTIVE REGIONS

摘要

A masking layer is formed on a dielectric region of an electronic device so that, during subsequent formation of a capping layer on electrically conductive regions of the electronic device that are separated by the dielectric region, the masking layer inhibits formation of capping layer material on or in the dielectric region. The capping layer can be formed selectively on the electrically conductive regions or non-selectively. Capping layer material formed over the dielectric region can subsequently be removed, thus ensuring that capping layer material is formed only on the electrically conductive regions. The capping layer can be formed using appropriate processes.