发明名称 |
VERFAHREN ZUR HERSTELLUNG EINZELNER MIKROLINSEN ODER EINES MIKROLINSENARRAYS |
摘要 |
Production of single microlenses or microlens arrays made from glassy material comprises preparing a first substrate having a surface with recesses, covering the first substrate with a second substrate, joining together in a vacuum, tempering the substrate composite so that the second substrate reaches into the recesses of the first substrate. The side of the second substrate facing away from the first substrate is structured to form a microlens surface. The glassy material of the second substrate flows into the recesses of the first substrate to form a microlens surface. An Independent claim is also included for an alternative process for the production of single microlenses or microlens arrays made from glassy material. |
申请公布号 |
DE502004001729(D1) |
申请公布日期 |
2006.11.23 |
申请号 |
DE20045001729T |
申请日期 |
2004.03.22 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
QUENZER, JOACHIM;MERZ, PETER;BOTT, UWE |
分类号 |
C03B23/02;B81C1/00;C03B19/02;H01L21/20 |
主分类号 |
C03B23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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