发明名称 |
APPARATUS FOR CARRYING IN/OUT SUBSTRATE AND METHOD FOR CARRYING IN/OUT SUBSTRATE |
摘要 |
<p>An apparatus for carrying in and out a substrate is provided for taking out the substrate from a tray or carrying the substrate onto the tray. The apparatus separates the stacked trays and permits a substrate supporting pin to enter into a space made by the separation. In the status where the substrate supporting pin is positioned under the tray to be carried in/out, the substrate supporting pin is inserted into a pin inserting hole of the tray to be carried in/out. At the time of taking out the substrate, the substrate is lifted from the tray by the substrate supporting pin so that the substrate can be taken out.</p> |
申请公布号 |
WO2006123520(A1) |
申请公布日期 |
2006.11.23 |
申请号 |
WO2006JP308633 |
申请日期 |
2006.04.25 |
申请人 |
HIRATA CORPORATION;KAMICHIKA, TETSURO;UEDA, TOMOHIRO |
发明人 |
KAMICHIKA, TETSURO;UEDA, TOMOHIRO |
分类号 |
B65G49/06 |
主分类号 |
B65G49/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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