发明名称 |
Integrated optical MEMS devices |
摘要 |
A method for fabricating an optical device and micromechanical device, wherein both devices are monolithically-integrated with a substrate. The optical surfaces and micromechanical devices are each formed in an etch step that is well-suited for forming that device. In addition, the embodiments of the present invention enable the optical surface and micromechanical device to be fabricated irrespective of severe topography on the surface of the substrate.
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申请公布号 |
US2006261032(A1) |
申请公布日期 |
2006.11.23 |
申请号 |
US20050130904 |
申请日期 |
2005.05.17 |
申请人 |
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
KRISHNAMOORTHY UMA;LEE DAESUNG;SOLGAARD OLAV;YU KYOUNGSIK |
分类号 |
C23F1/00;B44C1/22 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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