| 摘要 |
The present invention relates to a cooling system, the cooling system having a nozzle which receives coolant from a reservoir and which faces a substrate. The nozzle may be opened and closed by a thermally responsive valve allowing the coolant to be automatically metered to the substrate, thus controlling the spatial distribution of the coolant that is applied to the substrate. This approach allows hotter areas of the substrate to receive more coolant, thus eliminating nonuniformities in the thermal profile of the substrate.
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