| 摘要 |
A measurement apparatus and method are provided for determining the material composition of a sample. An X-ray fluorescence detector ( 412 ) detects fluorescent X-rays coming from said sample under irradiation with incident X-rays. A laser source ( 301 ) is adapted to produce a laser beam. Focusing optics ( 302 ) focus said laser beam into a focal spot on a surface of said sample. An optical sensor ( 312 ) detects optical emissions coming from particles of said sample upon being exposed to said laser beam at said focal spot. A gas administration subsystem ( 104, 105, 106, 107, 108 ) is adapted to controllably deliver gas to a space ( 101 ) around said focal spot.
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