| 发明名称 |
Method and apparatus for preventing ALD reactants from damaging vacuum pumps |
| 摘要 |
A secondary reaction chamber with a mesh reactor element and a heater assembly are positioned in a foreline between a CVD reaction chamber and a vacuum pump to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.
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| 申请公布号 |
US2006264045(A1) |
申请公布日期 |
2006.11.23 |
| 申请号 |
US20050136610 |
申请日期 |
2005.05.23 |
| 申请人 |
GU YOUFAN;NEUMEISTER DAVID |
发明人 |
GU YOUFAN;NEUMEISTER DAVID |
| 分类号 |
H01L21/44;C23C16/00 |
主分类号 |
H01L21/44 |
| 代理机构 |
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代理人 |
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| 主权项 |
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