发明名称 System and method for analyzing electrical failure data
摘要 Some embodiments of the invention include system and method for performing a calculation on the data associated with a group of wafers. The system and method display a wafer map having map indicators representing calculation results from the calculation. Other embodiments are described and claimed.
申请公布号 US2006265156(A1) 申请公布日期 2006.11.23
申请号 US20060493716 申请日期 2006.07.26
申请人 MICRON TECHNOLOGY, INC. 发明人 SUN XUEQING;EYOLFSON MARK;LANGWORTHY CHRIS;MAJOR KARL L.
分类号 G01R31/00;G01R31/319;G11C29/00;G11C29/56 主分类号 G01R31/00
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