INTERFACE BETWEEN CONVEYOR AND SEMICONDUCTOR PROCESS TOOL LOAD PORT

摘要

The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x- drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port - allowing the tool load device to service multiple load ports.