发明名称 Structured semiconductor chip, for use with electronic component, has passivation layer made of silicon carbide comprising high breaking point/tensile strength, where layer is provided on silicon oxide layer
摘要 <p>The chip has an intermediate oxide layer (1) formed between an upper conductor consisting of aluminum and a lower conductor, and a silicon oxide layer (3) provided on the intermediate oxide layer (1) and the upper conductor (2). A passivation layer (5) made of silicon carbide having high breaking point/tensile strength is provided on the silicon oxide layer, where the thickness of the passivation layer is 100-1,000 nanometer.</p>
申请公布号 DE102005020806(A1) 申请公布日期 2006.11.23
申请号 DE20051020806 申请日期 2005.05.04
申请人 INFINEON TECHNOLOGIES AG 发明人 HARTNER, WALTER;BUSCH, JOERG;GOELLNER, REINHARD
分类号 H01L23/28;H01L23/485;H01L23/522 主分类号 H01L23/28
代理机构 代理人
主权项
地址