发明名称 |
Structured semiconductor chip, for use with electronic component, has passivation layer made of silicon carbide comprising high breaking point/tensile strength, where layer is provided on silicon oxide layer |
摘要 |
<p>The chip has an intermediate oxide layer (1) formed between an upper conductor consisting of aluminum and a lower conductor, and a silicon oxide layer (3) provided on the intermediate oxide layer (1) and the upper conductor (2). A passivation layer (5) made of silicon carbide having high breaking point/tensile strength is provided on the silicon oxide layer, where the thickness of the passivation layer is 100-1,000 nanometer.</p> |
申请公布号 |
DE102005020806(A1) |
申请公布日期 |
2006.11.23 |
申请号 |
DE20051020806 |
申请日期 |
2005.05.04 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
HARTNER, WALTER;BUSCH, JOERG;GOELLNER, REINHARD |
分类号 |
H01L23/28;H01L23/485;H01L23/522 |
主分类号 |
H01L23/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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